Single photomask lithography for shape modulation of micropatterns

Author 1

Sang Hun Lee, Sung Eun Seo, Kyung Ho Kim, Jiyeon Lee, Chul Soon Park, Bong-Hyun June, Seon Joo Park

Author 2

Oh seok kwon*

Journal

Journal of Industrial and Engineering Chemistry

Vol

2020, 84, 196-201 (IF 6.064)

Year

2020

Link

https://www.sciencedirect.com/science/article/abs/pii/S1226086X2030006… 1774회 연결